Impurity diffusing furnace

Details Impurity diffusing furnace Impurity diffusing furnace

1992-02-03

1992-12-29

Yuen, Henry C.

Heating

Processes of heating or heater operation

Including preparing or arranging work for heating

432 6, 432253, F27D 500

Patent

active

051747456

ABSTRACT:
An impurity furnace is disclosed, which includes: an atmoscan tube 1, a gas inlet 20, a processor tube 2, a door flange 60 and a discharge tube 70.
A pressure gage 80 is installed at a side of the door flange 60, for measuring the internal pressure of the atmoscan tube 1 and transmitting the measured value thereof in the form of electrical signals. A microcomputer 3 connected to pressure gage compares the measured value of the pressure gage with a preset reference value, and generates control signals in order to control the opening degree of a butterfly valve 90. The butterfly valve is connected to the microcomputer 3, the opening degree thereof being controlled by the value controlling the signals from the microcomputer 3. The discharge tube extends from the interior of the atmoscan tube to the butterfly valve.

REFERENCES:
patent: 3690629 (1972-09-01), Scott
patent: 4437835 (1984-03-01), Martin
patent: 4439146 (1984-03-01), Sugita
patent: 4569658 (1986-02-01), Wiggins et al.
patent: 4613305 (1986-09-01), Sakurai
patent: 4726764 (1988-02-01), Yoshikai
patent: 4955808 (1990-09-01), Miyagawa

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