Chemical mechanical polishing apparatus with orbital polishing

Details Chemical mechanical polishing apparatus with orbital polishing Chemical mechanical polishing apparatus with orbital polishing

1997-04-04

1999-05-04

Rose, Robert A.

Abrading

Machine

Rotary tool

451291, 451288, 451289, 451270, 451271, B24B 722

Patent

active

058998004

ABSTRACT:
A chemical mechanical polishing apparatus polishes the surface of a substrate to remove material therefrom, The apparatus includes a carrier, which positions the substrate against the rotating polishing pad. The carrier includes an integral loading member therein, which controls the load force of the substrate against the polishing pad. Multiple substrates may be simultaneously polished on a single rotating polishing pad, and the polishing pad may be rotationally oscillated to reduce the likelihood that any contaminants are transferred from one substrate to another along the polishing pad. A multi-lobed groove in the polishing pad may be used, in conjunction with a moving substrate, to polish the surface of the substrate.

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