Energy filter for charged particle beam apparatus

Details Energy filter for charged particle beam apparatus Energy filter for charged particle beam apparatus

1991-08-06

1992-06-30

Berman, Jack I.

Radiant energy

Electron energy analysis

250294, 250296, H01J 4948

Patent

active

051265656

ABSTRACT:
An energy selecting filter comprising a structure of four hemispheres to be transpassed successively by a beam of charged particles to be filtered. The structure is symmetrically with respect to a plane of symmetry in which the energy selecting element, such as slit or a knife-edge is introduced. In a charged particle beam apparatus such as a high resolution electron microscope the energy spread introduced by a source can adjustable be reduced to below for example 0,1 eV without introducing any beam deviation at the cost of only a small lengthening of the apparatus.

REFERENCES:
patent: 3061720 (1962-10-01), Ewald
patent: 3766381 (1973-10-01), Watson
patent: 4845361 (1989-07-01), Ibach et al.

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