Correction system for a charged-particle beam apparatus

Details Correction system for a charged-particle beam apparatus Correction system for a charged-particle beam apparatus

1990-08-07

1992-01-28

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396ML, H01J 3710

Patent

active

050846221

ABSTRACT:
A correction system for a high resolution charged particle beam apparatus provided with two hexapoles enclosing a telescopic round-lens system with two lenses which are arranged so that outer focal points of the lenses are coincident with nodal points which coincide with center points of the hexapoles. An additional coma-free round-lens doublet is added for imaging a coma-free plane of a lens to be corrected into a center plane of a first hexapole of the system. For both round-lens doublets the spacing between of the two lenses preferably equals 2f, f being the focal length of each lens.

REFERENCES:
patent: 4389571 (1983-06-01), Crewe
patent: 4414474 (1983-11-01), Crewe
patent: 4962313 (1990-10-01), Rose
Rose, H., "Correction of Aperture Aberrations in Magnetic Systems with Threefold Symmetry", Nuclear Instruments & Methods, 187, (1981), pp. 187-199.
Rose, H., "Inhomogeneous Wien Filter as a Corrector Compensating for the Chromatic and Spherical Aberration of Low-Voltage Electron Microscopes", OPTIK: Journ. for Light & Electron Optics, vol. 84, No. 3, Mar. 1990, pp. 92-107.

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