Positive-working, radiation-sensitive mixture based on acid-clea

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

430326, 430330, 522 68, G03F 7004, G03F 730

Patent

active

050843710

ABSTRACT:
A positive-working, radiation-sensitive mixture and a process for the production of relief images.
The radiation-sensitive mixture contains

REFERENCES:
patent: 3869292 (1975-03-01), Peters
patent: 3915706 (1975-10-01), Limburg et al.
patent: 3923514 (1975-12-01), Marsh
patent: 4377631 (1983-03-01), Toukhy et al.
patent: 4678737 (1987-07-01), Schneller et al.
patent: 4770977 (1988-10-01), Buiguez et al.
patent: 4789619 (1988-12-01), Ruckert et al.
patent: 4797348 (1989-01-01), Nakamura et al.
patent: 4804612 (1989-02-01), Asaumi et al.
patent: 4820607 (1989-04-01), Aoai
patent: 4883740 (1989-11-01), Schwalm et al.
Journal of Imaging Technology, vol. 11, No. 4, Aug. 1985, pp. 146-157.
Kaplan, L. H., Exposure Time Reduction for Positive Photoresists, 1970, vol. 13, No. 2.
Batchelder, Tom and Piatt, John, Bake Effects in Positive Photoresist.
Novolac Resins Used in Positive Resist Systems--Pampalone--"Solid State Technology", Jun. 1984, pp. 115-120.
Evaluation of Pure Novolak Cresol-Formaldehyde Resins for Deep U.V. Lithography, Gipstein et al, J. Electrochemical Soc., 129 (1982), pp. 201-205.
Phenolic Resins, Springer Verlag (1985), Knop and Pilato.
U.S. Ser. No. 214,011, Sulfonium Salts Having Acid-Labil Groups--Schwalm et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Positive-working, radiation-sensitive mixture based on acid-clea does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Positive-working, radiation-sensitive mixture based on acid-clea, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Positive-working, radiation-sensitive mixture based on acid-clea will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1860581

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.