Electrically confined VCSEL

Coherent light generators – Particular active media – Semiconductor

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372 96, H01S 319

Patent

active

058480862

ABSTRACT:
A semiconductive substrate (101) with a surface (102) having a first stack of distributed Bragg reflectors (109) disposed on the surface (102) of the semiconductive substrate (101) that has dot patterned features (252 and 354). A first cladding region (113) is disposed on the first stack of distributed Bragg reflectors (109). An active area (117) is disposed on the first cladding region (113) with a second cladding region (123) disposed on the active area (117). A second stack of distributed Bragg reflectors (127) is disposed on the second cladding region (123). The dot patterned features produce an offset in the stacks of reflectors and a portion of the second stack of distributed Bragg reflectors is oxidized, using the offset, to limit the current path.

REFERENCES:
patent: 5359618 (1994-10-01), Lebby et al.
patent: 5446752 (1995-08-01), Ackley et al.
patent: 5493577 (1996-02-01), Choquette et al.
patent: 5719891 (1998-02-01), Jewell
patent: 5729566 (1998-03-01), Jewell

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