Semiconductor device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257380, 257900, H01L 2976

Patent

active

057539570

ABSTRACT:
The present invention is mainly characterized in that a Bi-CMOS is obtained in which characteristics of a bipolar transistor are not deteriorated. The device includes a bipolar transistor and a CMOSFET formed on a semiconductor substrate separately from each other by a field oxide film. The thickness of a gate electrode of an NMOSFET and a gate electrode of a PMOSFET is made larger than the thickness of an emitter electrode of the bipolar transistor.

REFERENCES:
patent: 4044452 (1977-08-01), Abbas et al.
patent: 4735916 (1988-04-01), Homma et al.
patent: 4752589 (1988-06-01), Schaber
patent: 4812417 (1989-03-01), Hirao
patent: 5124817 (1992-06-01), Brassington et al.
patent: 5192992 (1993-03-01), Kim et al.
patent: 5208472 (1993-05-01), Su et al.
IEEE Electron Device Letters, vol. 13, No. 8, pp. 392-395 by Bashir et al., Aug. 1992.
HSST/BiCMOS Technology with 26ps ECL and 45ps 2V CMOS Inverter, Konaka et al., 1990 IEEE pp. 493-496, Dec. 1990.
2 Micron Merged Bipolar-CMOS Technology, Alvarez et al., 1984 IEDM pp. 761-764, Dec. 1984.

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