Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1997-02-20
1998-05-19
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257380, 257900, H01L 2976
Patent
active
057539570
ABSTRACT:
The present invention is mainly characterized in that a Bi-CMOS is obtained in which characteristics of a bipolar transistor are not deteriorated. The device includes a bipolar transistor and a CMOSFET formed on a semiconductor substrate separately from each other by a field oxide film. The thickness of a gate electrode of an NMOSFET and a gate electrode of a PMOSFET is made larger than the thickness of an emitter electrode of the bipolar transistor.
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IEEE Electron Device Letters, vol. 13, No. 8, pp. 392-395 by Bashir et al., Aug. 1992.
HSST/BiCMOS Technology with 26ps ECL and 45ps 2V CMOS Inverter, Konaka et al., 1990 IEEE pp. 493-496, Dec. 1990.
2 Micron Merged Bipolar-CMOS Technology, Alvarez et al., 1984 IEDM pp. 761-764, Dec. 1984.
Mitsubishi Denki & Kabushiki Kaisha
Prenty Mark V.
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