Nonvolatile memory cell with P-N junction formed in polysilicon

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257315, 257317, 257318, 438264, 3651851, 3651856, H01L 29788

Patent

active

057539529

ABSTRACT:
An integrated circuit memory cell (10) is formed with a P-N junction polycrystalline floating gate (13) with a lightly boron doped on the source side (13B) and a heavily arsenic or phosphorous doped on the drain side (13A) plus the channel region (Ch) . The cells (10) are formed in an array at a face of a semiconductor body (22), each cell including a source (11) and including a drain (12). An improved over-erase characteristic is achieved by forming a P-N junction (JU) in the floating gate (13). Use of a P-N junction (JU) in polycrystalline floating gate (13) prevents the cell (10) from going into depletion, causes a tighter distribution of erased threshold voltages V.sub.T, and improves device life because fewer electrons travel through the gate oxide (30).

REFERENCES:
patent: 5412603 (1995-05-01), Schreck et al.
patent: 5554552 (1996-09-01), Chi
Kurylo et al., "Nonvolatile MIS Charge Storage Devices", IBM Technical Disclosure bulletin, vol. 19, No. 3, pp. 871-872, Aug. 1976.

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