Process of controlling particle size of naphthoquinone diazide e

Details Process of controlling particle size of naphthoquinone diazide e Process of controlling particle size of naphthoquinone diazide e

1997-12-22

2000-06-20

Clardy, S. Mark

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazo or diazonium

C07C24500

Patent

active

06077942&

ABSTRACT:
A process for producing a naphthoquinone diazide ester of a phenolic compound that is useful in a photoresist composition, which process comprises providing a naphthoquinone diazide ester solution in an organic polar solvent; adding the resulting naphthoquinone diazide ester solution to a precipitation bath that is maintained at a temperature of from about 0.degree. C. to about -30.degree. C.; and filtering the resulting naphthoquinone diazide ester.

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