System and method for detecting the center of an integrated circ

Details System and method for detecting the center of an integrated circ System and method for detecting the center of an integrated circ

1987-04-20

1989-04-04

Ruggiero, Joseph

Boots, shoes, and leggings

2504421, 318640, 364513, 364559, 414225, 901 6, 901 47, G06F 1546, G21K 510, B65H 100

Patent

active

048191671

ABSTRACT:
A system and method for determining the precise location of a moving object such as a semiconductor wafer relative to a destination position, using an array of optical sensors positioned along an axis generally transverse to the path of movement of the wafer. The sensor trigger points along the path of movement are used to calculate the center position of the wafer relative to the destination position.

REFERENCES:
patent: 4449885 (1984-05-01), Hertel et al.
patent: 4507078 (1985-03-01), Tam et al.
patent: 4523985 (1985-06-01), Dimock
patent: 4647266 (1987-03-01), Coad et al.
patent: 4705951 (1987-11-01), Layman et al.
patent: 4720635 (1988-01-01), Uga

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