Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent
1996-05-31
1999-09-07
Picardat, Kevin M.
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
438123, 2281805, H01L 2144
Patent
active
059501006
ABSTRACT:
In an apparatus for manufacturing a semiconductor device, insulator is sprayed to a bonding wire continuously fed from a capillary immediately after a first bonding to coat the bonding wire with the insulator. The spray is stopped immediately before the capillary reaches a second bonding position. Then, a second bonding is performed when the capillary reaches the second bonding position.
REFERENCES:
patent: 4678114 (1987-07-01), Egawa et al.
patent: 5045151 (1991-09-01), Edell
patent: 5396104 (1995-03-01), Kimura
patent: 5656830 (1997-08-01), Zechman
NEC Corporation
Picardat Kevin M.
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