Apparatus and method for making integrated circuits

Details Apparatus and method for making integrated circuits Apparatus and method for making integrated circuits

1997-01-29

1997-12-23

Bueker, Richard

Fishing, trapping, and vermin destroying

437228, 437241, 427569, 427579, 118723E, 118728, 118500, 156345, 1566431, 20429815, H01L 2100, H01L 21318

Patent

active

057007250

ABSTRACT:
An improved apparatus and method for the manufacture of integrated circuits is disclosed. At least three protrusions extend from the wafer support susceptor. The protrusions slightly electrically decouple the wafer from the susceptor during plasma processing. The protrusions prevent gradual debris build-up on the susceptor from causing variation from lot-to-lot in plasma processing results.

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