Forming self-aligned diffusion barriers in solid state devices u

Details Forming self-aligned diffusion barriers in solid state devices u Forming self-aligned diffusion barriers in solid state devices u

1993-06-11

1994-11-01

McCamish, Marion E.

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

430313, 430317, 430329, 156643, 1566591, 1566611, G03C 500

Patent

active

053606973

ABSTRACT:
A conductive self-aligned diffusion barrier is formed by using a self-aligned lift-off process.

REFERENCES:
patent: 5017459 (1991-05-01), McColgin
patent: 5057186 (1991-10-01), Chew
J. M. Frary et al., "Lift-Off Techniques for Fine Line Metal Patterning", Semiconductor International, pp. 72-82, Dec. 1981.

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