Optic column having particular major/minor axis magnification ra

Details Optic column having particular major/minor axis magnification ra Optic column having particular major/minor axis magnification ra

Filed on

1993-09-27

Date issued

1994-11-08

Examiner

Berman, Jack I.

Patent Class

Radiant energy

SubClass

With charged particle beam deflection or focussing

SubSubClass

Magnetic lens

Other Related Categories

2504921, G21K 1093

Type

Patent

Status

active

Patent number

053629680

Description

ABSTRACT:
An optic column is provided to obtain a micro beam in simple structure. The optic column has a line cathode and multi-pole lenses arranged in three steps. A beam orbit in the major axis direction (X direction) and a beam orbit in the minor axis direction (Y direction) cross each other on the image plane. A ratio of magnification Mx of X-directional orbit to magnification My of Y-directional orbit is coincident with a ratio of width W to length H of the line cathode.

REFERENCES:
patent: 4736106 (1988-04-01), Kushy et al.
patent: 4804851 (1989-02-01), Nixon
patent: 5013913 (1991-05-01), Benner et al.
Brodie, J. Vac. Sci. Technol. B, Second Series, vol. 8, No. 6, Nov./Dec. 1990, pp. 1691-1697.

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