Radiation sensitive compositions comprising polymer having acid

Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...

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430193, 430313, 430905, 430909, G03C 154, G03C 558

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active

052582574

ABSTRACT:
The invention provides a radiation sensitive composition having a polymer binder of phenolic and cyclic alcohol units. At least a portion of the phenolic units and/or cyclic alcohol units of the polymer are bonded to acid labile groups. High solubility differentials between exposed and unexposed regions are realized with only moderate substitution of the binder with the acid labile groups.

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Y. Onishi, et al., Journal of Photopolymer Science and Technology, vol. 4, No. 3, pp. 337-340 (1991).

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