Method for pulling up semiconductor single crystal

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step

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1566171, 1566204, 422249, C30B 1522

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active

053063872

ABSTRACT:
A semiconductor single crystal rod having a controlled oxygen concentration distribution in the direction of length is produced by method of pulling up a semiconductor melt held in a quartz glass crucible under application of a magnetic field, which method is characterized by fixing the rotational speed of said quartz crucible at a level exceeding 5 rpm and varying the intensity of said magnetic field applied to said molten semiconductor according to the length of pull of said single crystal rod.

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patent: 4849188 (1989-07-01), Takasu et al.
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IBM Technical Disclosure Bulletin, vol. 26, No. 11, Apr. 1982, pp. 5790-5791; Kim, et al.; "Control of Oxygen Segregation In Czochralski . . . ".
Applied Physics Letters, vol. 50, No. 6, Feb. 1987; pp. 329-331; Ozawa, et al; "Programmed Nagentic Field Applied Liquid Encapsulated Czochralski . . . ".
Journal of Applied Physics; vol. 50, No. 7, Oct. 1985; pp. 2731-2735; Kim, et al.; "Striations in CZ Silicon Crystals Grown Under Various Axial . . . ".
Solid State Technology; vol. 33, No. 4, Apr. 1990; pp. 163-167; Thomas, et al; "Melt Grown of Large Diameter Semiconductors: Part II".
Research: "Getting Holes Out of Silicon Chips"; Sony Corp.
Electronics: "Magnetic Field Breeds Skylab-like Semiconductors"; Cohen, (1980) pp. 83-84.

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