Sensor devices having a movable structure

Details Sensor devices having a movable structure Sensor devices having a movable structure

1997-07-30

1999-06-22

Ngo, Ngan V.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257420, 7351415, 7351416, 7351429, 7351432, H01L 2982

Patent

active

059145218

ABSTRACT:
A sensor (11) has a movable plate (16) that moves in response to an external acceleration. The movable plate (16) has a finger (17) that is capacitively coupled to fingers (13,14) that are attached to a substrate (12). A travel stop (19) is used to stop the movable plate (16) before the finger (17) on the movable plate (16) collides into the fingers (13,14) on the substrate (12).

REFERENCES:
patent: 4882933 (1989-11-01), Petersen et al.
patent: 5181156 (1993-01-01), Gutteridge et al.
patent: 5500549 (1996-03-01), Takeuchi et al.
patent: 5542295 (1996-08-01), Howe et al.
patent: 5682053 (1997-10-01), Wiszniewski

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