Fishing – trapping – and vermin destroying
Patent
1992-08-12
1994-02-22
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437195, 437246, H01L 2144, H01L 2148
Patent
active
052886654
ABSTRACT:
A process is described for forming an aluminum plug in a via in an insulating layer in an integrated circuit structure by first depositing a layer of aluminum over the insulating layer in a multistep deposition which will also result in filling the via with aluminum to form an aluminum plug therein, followed by removal of any additional aluminum formed over the surface of the insulating layer, and subsequent formation of one or more patterned conductive layers over the insulating surface which is in electrical communication with the underlying aluminum plug in the via. The one or more patterned conductive layers formed over the insulating surface are characterized by superior electrical properties over the aluminum layer initially deposited and then removed. A barrier layer may be first formed over exposed portions of the underlying integrated circuit structure at the bottom of the via before it is filled with aluminum.
REFERENCES:
patent: 4619887 (1986-10-01), Hooper
patent: 4879257 (1989-11-01), Patrick
patent: 5026666 (1991-06-01), Hills et al.
patent: 5108951 (1992-04-01), Chen et al.
patent: 5124780 (1992-06-01), Sandhu
Wolf, Silicon Processing for the VLSI Era, vol. 2, published by Lattice Press, 1990.
Applied Materials Inc.
Chaudhuri Olik
Taylor John P.
Tsai H. Jey
LandOfFree
Process for forming low resistance aluminum plug in via electric does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for forming low resistance aluminum plug in via electric, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for forming low resistance aluminum plug in via electric will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-170840