Semiconductor processing system with robotic autoloader and load

Details Semiconductor processing system with robotic autoloader and load Semiconductor processing system with robotic autoloader and load

1991-12-30

1993-07-06

Werner, Frank E.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

118719, 20429825, 414732, 414917, 414225, 414626, 2941191, B65G 6500

Patent

active

052248097

ABSTRACT:
A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

REFERENCES:
patent: 3007097 (1961-10-01), Shelley et al.
patent: 3255893 (1966-06-01), Hainer et al.
patent: 3820667 (1974-06-01), Critchlow et al.
patent: 3874525 (1975-04-01), Hassan et al.
patent: 4319864 (1982-03-01), Kaufeldt
patent: 4345866 (1982-08-01), Greene
patent: 4417845 (1983-11-01), Burton
patent: 4449884 (1984-05-01), Motoda
patent: 4457661 (1984-07-01), Flint et al.
patent: 4547119 (1985-10-01), Chance et al.
patent: 4604026 (1986-08-01), Barrett
Solid State Technology article entitled "Wafer Handling Robot", Equipment Frontiers section, Jan., 1985.

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