Method and apparatus for measuring film thickness using a second

Details Method and apparatus for measuring film thickness using a second Method and apparatus for measuring film thickness using a second

1987-04-29

1989-03-07

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356376, G01B 1124

Patent

active

048108944

ABSTRACT:
A film thickness measuring method and device therefor which are free from drawbacks caused by errors in a sheet conveying system and an optical system of the device and the like. The optical system is moved over a sheet having a sheet member and a film formed thereon, whose thickness is to be measured, so that the deformation of the conveying system and the optical system is detected in advance. After taking the detection results into an account, the thickness measurement is carried out resulting in improving an accuracy thereof.

REFERENCES:
patent: 3518441 (1970-06-01), Selgin
patent: 4311392 (1982-01-01), Yazaki et al.
patent: 4532723 (1985-08-01), Kellie et al.
patent: 4730116 (1988-03-01), Ida et al.

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