Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1997-06-19
1999-11-30
Gupta, Yogendra
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419212, 20429803, 118712, C23C 1434
Patent
active
059936150
ABSTRACT:
The present invention is a thin film deposition tool with arc detection capabilities. An arc detector is provided in the power supply line between the power supply and the sputter deposition tool. Arcs are detected by the arc detector and counted using a logic circuit. Arc data is collected and analyzed and real-time data is provided which can be used to stop further processing until a repair is made.
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patent: 5718813 (1998-02-01), Drummond et al.
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Abry Charles R.
Murphy William J.
Seward Jeffrey N.
Gupta Yogendra
Ingersoll Christine E.
International Business Machines - Corporation
Leas James M.
Peterson Peter W.
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