Semiconductor memory device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257758, H01L 31119

Patent

active

061440558

ABSTRACT:
A dynamic memory device includes a buried plate-wiring connected to a plate electrode of a memory cell. A plate potential is supplied to the buried plate-wiring via a plate potential supply-wiring. A connection node of the buried plate-wiring and the plate potential supply-wiring is arranged at a side of the memory cell array opposed to a side of a row decoder array.

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patent: 5874332 (1999-02-01), Ema
IEEE Transactions on Electron Device vol. 35, No. 8, Aug. 1988, pp. 1257-1263, "Half-Vcc Sheath Plate Capacitor DRAM Cell With Self-Aligned Buried Plate-Wiring," T. Kaga et al.
International Electron Devices Meeting 1993, A 0.6 .mu.m.sup.2 256 Mb Trench DRAM Cell With Self-Aligned Buried Strap (BEST), L. Nesbit et al.
Weste et al. "Principles of CMOS VLSI Design," plate 13, 1995.

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