Reticle pre-alignment apparatus and method thereof

Details Reticle pre-alignment apparatus and method thereof Reticle pre-alignment apparatus and method thereof

1995-12-20

1998-09-22

Hantis, K.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

G01B 1100

Patent

active

058122710

ABSTRACT:
A reticle pre-alignment apparatus and method are provided. The apparatus includes a reticle carrier for loading a reticle at a predetermined position on a reticle stage, a light source arranged over the reticle stage for emitting light, an alignment mark formed in the reticle for passing the light, a sensor arranged under the reticle stage for receiving the light passed through the alignment mark to generate a predetermined signal, and a controller for processing the signal from the sensor to drive the reticle carrier, thereby enhancing productivity and simplifying the pre-alignment apparatus and method by increasing speed and accuracy.

REFERENCES:
patent: 3569718 (1971-03-01), Borner
patent: 4252442 (1981-02-01), Dandliker et al.
patent: 4878086 (1989-10-01), Isohata et al.
patent: 5301013 (1994-04-01), Meijer et al.

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