Electric heating – Heating devices – With power supply and voltage or current regulation or...
Patent
1996-12-30
1998-10-27
Paschall, Mark H.
Electric heating
Heating devices
With power supply and voltage or current regulation or...
219483, 219509, 219497, 392488, 432 12, H05B 102
Patent
active
058280391
ABSTRACT:
A method and apparatus for heating a chemical used in microelectronic device fabrication processes. The apparatus includes a chemical supply and chemical bath for containing a chemical. A temperature sensor senses the temperature of the chemical contained in the chemical bath. A first heater, powered by a first electric power source, heats the chemical while it is being supplied to the chemical bath. A second heater, powered by a second electric power source, heats the chemical contained in the chemical bath. First and second power controllers regulate the first electric power and the second electric power sources, respectively, through a plurality of electrodes having different intensity levels that are selected according to the temperature of the chemical sensed by the temperature sensor.
REFERENCES:
patent: 4380431 (1983-04-01), Carlson, Jr. et al.
patent: 4459468 (1984-07-01), Bailey
patent: 4959526 (1990-09-01), Kurachi et al.
patent: 5214740 (1993-05-01), Carroll
patent: 5288471 (1994-02-01), Corner
patent: 5539673 (1996-07-01), Charm et al.
Paschall Mark H.
Samsung Electronics Co,. Ltd.
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