Discrete vacuum ultra violet reflective interference filter

Details Discrete vacuum ultra violet reflective interference filter Discrete vacuum ultra violet reflective interference filter

1993-07-27

1997-02-18

Hantis, K.

Optical: systems and elements

Having significant infrared or ultraviolet property

Multilayer filter or multilayer reflector

359589, G02B 520

Patent

active

056046294

ABSTRACT:
A thin film reflecting interference filter (RIF) is designed to suppress unwanted harmonics thereby improving the monochromaticity of the radiation. An interference layer of material which has a well-defined plasma oscillation is deposited on a substrate and a mismatch layer is formed thereon. This interference layer exploits the interference between wavefronts reflected from the layer-substrate and the vacuum-layer interfaces to suppress higher order harmonics, while allowing good reflectance at the fundamental wavelength. This is achieved by positioning the RIF in the radiation at an angle of incidence which is greater than the critical angle of the desired fundamental wavelength, but less than critical angles of the harmonics to be suppressed. The mismatch layer increases the reflectance of the unwanted harmonics at the vacuum-layer interface, thus allowing more complete destructive interference of the unwanted harmonics. The RIF can be tuned by altering the thickness of the layer, the composition of the layer and/or the angle of incidence of the radiation.

REFERENCES:
patent: 4408825 (1983-10-01), Stelmack
patent: 4714308 (1987-12-01), Sawamura et al.
patent: 5311098 (1994-05-01), Seely et al.
Raines, "The Wave Mechanics of Electrons in Metals" 1970.
Flaugh et al, "Development of a New Optical Wavelength Rejection Filter . . Spectroscopy", Applied Spectroscopy vol. 38, #6, 1984 p. 847.
Seely et al, "Thin Film Interference Optics for Imaging the O II 834.sup.o -.ANG. Airglow," Applied Optics, vol. 30, #19, Jul. 1, 1991 pp. 2788-2794.

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