Semiconductor acceleration sensor

Details Semiconductor acceleration sensor Semiconductor acceleration sensor

1998-03-12

2000-05-02

Meier, Stephen D.

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

257415, H01L 2982

Patent

active

060575859

ABSTRACT:
A semiconductor acceleration sensor comprises a base having a first surface for receiving an acceleration force and a second surface disposed generally perpendicular to the first surface. A first detector is disposed on the second surface of the base for detecting an acceleration force in a horizontal direction of the base. A second detector is disposed on the second surface of the base for detecting an acceleration force in a vertical direction of the base. A support member is connected to one end of the base for supporting and fixing the base.

REFERENCES:
patent: 4699006 (1987-10-01), Boxenhorn
patent: 5265470 (1993-11-01), Kaiser et al.
patent: 5536963 (1996-07-01), Polla
patent: 5659195 (1997-08-01), Kaiser et al.

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