Servo circuit of scanning probe microscope

Details Servo circuit of scanning probe microscope Servo circuit of scanning probe microscope

1992-04-29

1994-03-08

Dzierzynski, Paul M.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3726

Patent

active

052930424

ABSTRACT:
An integrator for integrating a deviation signal and generating an integral control signal includes an operational amplifier for receiving a deviation signal through a first resistor, a capacitor connected between an inverting input terminal and an output terminal of the operational amplifier, and a series circuit constituted of a diode and a second resistor connected in parallel to the first resistor. If a probe and a sample approach each other and the deviation signal becomes is 0.7 V or more, charges are accumulated in the capacitor through the diode and second resistor as well as the first resistor. Thus, the voltage of the integral control signal is suddenly changed to the negative to separate the probe and sample from each other. If the probe and sample are separated from each other, the deviation signal becomes negative, and the charges are removed from the capacitor through the first resistor. The voltage of the integral control signal is thus changed to the positive to allow the probe and sample to approach each other. Since the diode prevents the charges from being removed through the second resistor, the change of the integral control signal to the positive is gentler than that of the integral control signal to the negative.

REFERENCES:
patent: 4889988 (1989-12-01), Elings et al.
patent: 4952857 (1990-08-01), West et al.
patent: 4954704 (1990-09-01), Elings et al.
patent: 5059793 (1991-10-01), Miyamoto et al.

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