Micro-displacement detector device, piezo-actuator provided with

Details Micro-displacement detector device, piezo-actuator provided with Micro-displacement detector device, piezo-actuator provided with

1990-04-04

1991-01-22

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

73105, 324662, H01J 3726

Patent

active

049873032

ABSTRACT:
A scanning tunnel microscope includes a piezo-actuator movable in a direction Z perpendicular to the surface of a sample and provided with a scanning probe projected downward from the bottom thereof. The scanning probe is moved in the direction Z by the piezo-actuator. The piezo-actuator includes a position measuring probe projected therefrom, parallel to the surface of the sample, from the lower end of one side thereof. A reference sample having concaves formed on a surface thereof at predetermined intervals is fixed to the piezo-actuator. When the scanning probe is moved in the direction Z, the position measuring probe is moved along the reference sample, so that tunnel current having a waveform which reproduces the shape of the concaved surface of the reference sample is detected. Thus, the moving distance of the scanning probe can be obtained from the waveform of tunnel current detected.

REFERENCES:
patent: 2715830 (1955-08-01), Lewis et al.
patent: 4560924 (1985-12-01), Nordberg
patent: 4883959 (1989-11-01), Hosoki et al.

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