Non-volatile semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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Details

257640, 257647, H01L 2934

Patent

active

054536340

ABSTRACT:
A memory coil section, formed on a semiconductor substrate and including a floating gate and a control gate, for storing a charge in a non-volatile semiconductor device is covered with a silicon nitride layer. The periphery of a contact hole for allowing contact between a wiring layer and the substrate is also covered with a silicon nitride layer.

REFERENCES:
patent: 4271582 (1981-06-01), Shirai et al.
patent: 4364167 (1982-12-01), Douley
patent: 4455568 (1984-12-01), Shiota
patent: 4642881 (1987-02-01), Matuskawa
patent: 4665426 (1987-05-01), Allen et al.
patent: 4789560 (1988-12-01), Yen
"Nitride Sidewall Spacers Used on a Contamination Barrier", IBM Technical Discolsure Bulletin, vol. 30 (Jan. 1988) pp. 295-296.

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