Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1993-08-25
1995-09-26
Pianalto, Bernard
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
2041922, 427131, 427132, 427576, 427577, 428694MT, 428695, 428698, 428699, C23C 1400
Patent
active
054531683
ABSTRACT:
A sputter-deposited wear-resistant protective coating for magnetic-recording alloy thin films is disclosed. The protective coating includes a protective layer and an interfacial adhesion layer. The protective layer is preferably titanium diboride or amorphous nitrided carbon, and the interfacial adhesion layer is preferably titanium, but can alternatively be other metals, such as zirconium or hafnium, which share characteristics similar to titanium. More broadly, the protective layer may be a nitride, carbide, or boride, or mixture thereof, of titanium, zirconium, hafnium, tantalum, vanadium, niobium, tantalum, chromium, molybdenum, or tungsten, and the interfacial adhesion layer may be the corresponding metal of the protective layer compound.
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Nelson Carl W.
Weir Richard D.
Pianalto Bernard
Tulip Memory Systems, Inc.
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