Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent
1993-12-06
1995-04-11
Weisstuch, Aaron
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
20419215, 20419225, 20429822, 20429826, 136265, 437 5, C23C 1435
Patent
active
054055172
ABSTRACT:
An apparatus is described for depositing a thin film (9) of compound materials on selected substrates (48) in an evacuable coating chamber. This apparatus includes a rotating primary surrogate magnetron cathode surface (19) which acts to receive, in-situ, material to be sputtered. Vapor crucibles (2) expose the rotating cathode surface (19) to material vapors (8) which condense on the thermally cooled cathode surface (19) to combine with other coatings on the cathode and are thence rotated through the associated plasma sputter zone (26P) to sputter deposit desired film (9). Auxiliary rotating magnetron cathodes (32) can deposit additional material onto rotating primary cathode (19). Molten material crucible assemblies (31) having coating rollers (34) can convey molten material onto rotating auxiliary thermally cooled cathode surfaces (32) which sputter coat primary cathode. When a selected combination of vapor crucibles (2) and auxiliary rotating cathodes (32) cooperate to coat rotating primary cathode surface (19) it is possible to deposit alloys or a large class of compound thin film materials in-situ without having to prefabricate cathodes of compound materials.
Sputter deposited film (9) uniformity is improved by use of three methods: cyclically varying power applied to the primary surrogate cathode, narrow sputter zones, and premixing of condensing vapors.
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A. Belkind, "Cosputtering and Serial Cosputtering Using Cylindrical Rotatable Magnetrons", J. Vac. Sci. Technol. A, 11(4) Jul./Aug. 1993, pp. 1501-1509.
Lampkin Curtis M.
Weisstuch Aaron
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