Forming sol-gel dichroic color filters

Details Forming sol-gel dichroic color filters Forming sol-gel dichroic color filters

1991-11-18

1994-03-15

Kunemund, Robert

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156600, 156603, 437132, C30B 702

Patent

active

052942880

ABSTRACT:
A process of forming dichroic color filters on substrates, particularly image sensors, includes using a spin-on-glass process to form low and high refractive index layers. A mixture of titania and silica partially hydrolyzed and condensed sol-gel polymer suspension in the high refractive index layer and in the low refractive index layer has a partially hydrolyzed and condensed silica sol-gel polymer suspension are processed and to cause titania to phase change.

REFERENCES:
patent: 4476156 (1984-10-01), Brinker et al.
patent: 4829031 (1989-05-01), Raj et al.
Lottiaux et al., "Morphology and Structure of TiO.sub.2 Thin Layers vs. Thickness and Substrate Temperatures", Thin Solid Films vol. 170 (1989) pp. 107-126.
Partlow, D. P. et al., "Thirty-Seven Layer Optical Filter from Polymerized Solgel Solutions," Applied Optics, vol. 29, No. 10, Apr. 1, 1990, 1526-1529.

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