Cleaning and liquid contact with solids – Apparatus – With heating – cooling or heat exchange means
Patent
1998-01-08
1999-09-14
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With heating, cooling or heat exchange means
134108, 134902, 1341021, B08B 310
Patent
active
059506466
ABSTRACT:
A vapor feed supply system including a vaporizer device and a method of cleaning a vapor flow region employing such a vaporizer device enables thorough cleaning of the system, without having to degrade the overall system vacuum in the process of cleaning the vaporizer device. The method includes defining a cleaning fluid passage having a predetermined withstand pressure by isolating a cleaning region of the vapor flow region, and flowing a cleaning fluid into the cleaning fluid passage under a pressure so as to enable the cleaning fluid to remain in a liquid state at a cleaning temperature of the cleaning region.
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Abe Masahito
Araki Yuji
Fukunaga Yukio
Horie Kuniaki
Murakami Takeshi
Ebara Corporation
Stinson Frankie L.
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