Method for measuring refractive index of thin film layer

Details Method for measuring refractive index of thin film layer Method for measuring refractive index of thin film layer

1989-12-20

1992-03-17

Turner, Samuel

Optics: measuring and testing

By polarized light examination

Of surface reflection

356361, G01J 400

Patent

active

050962981

ABSTRACT:
A method for measuring refractive index of a thin film layer formed on the other layer having a known refractive index includes following steps. A step of irradiating P-polarized monochromatic light and S-polarized monochromatic light individually on the thin film layer with a prescribed angle of incidence, a step of determining reflectances R.sub.p and R.sub.s for the P-polarized monochromatic light and S-polarized monochromatic light, respectively, by detecting luminous intensity of reflected light from the thin film layer, and a step of specifying the refractive index of the thin film layer by prescribed calculation either using the amount of phase changes produced by reflection of said P-polarized light and S-polarized light on a boundary surface between the thin film layer and the medium, the phase changes being determined in accordance with the refractive index of the medium and the reflectances R.sub.p and R.sub.s, or using the amount of phase changes of lights during propagation from an upper surface of the thin film layer to a lower surface thereof the phase changes being determined in accordance with the refractive index of the medium and the reflectances R.sub.p and R.sub.s.

REFERENCES:
Ruiz-Urbieta et al., "Methods for Determining Film Thickness and Optical Constants of Films and Substrates", J. Opt. Soc. Amer., vol. 61, pp. 351-359, 3/1971.

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