Semiconductor device of a silicon on insulator metal-insulator t

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

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257349, 257350, 257616, H01L 2701, H01L 2712, H01L 310392, H01L 31117

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active

057604428

ABSTRACT:
A first silicon oxide layer serving as an insulation layer is formed on a p-type semiconductor substrate. An n.sup.+ -type source and drain regions are formed on the p-type substrate 110 with a spacing therebetween. A channel region is interposed between the source and drain regions. A second silicon oxide layer serving as a gate insulation layer is formed on the channel region. A gate terminal is formed on the second silicon oxide layer. High-concentration p-type regions are formed in the p-type semiconductor substrate under the source and drain regions, respectively.

REFERENCES:
patent: 5485030 (1996-01-01), Terashima
An Analysis of the Concave MOSFET, by Kenhi Natori et al, IEEE Transactions on Electron Devices, vol. Ed. 35, No. 4, Apr., 1978, pp. 448-456.
Operating Theory of MOS Transistor, by Hara et al, pp. 131-139, Kindai Kagakusya.

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