Pixelized scintillation layer and structures incorporating same

Details Pixelized scintillation layer and structures incorporating same Pixelized scintillation layer and structures incorporating same

1997-12-05

1999-11-09

Hannaher, Constantine

Radiant energy

Invisible radiation responsive nonelectric signalling

Luminescent device

250367, G01T 120

Patent

active

059819596

ABSTRACT:
A pixelized scintillation layer is taught in which high aspect ratio columns of scintillation material are formed. The columns may be sized and spaced to correspond to the sizing and spacing of an underlying sensor array, or they may be sized such that there is plurality of columns for each pixel. A method for forming the pixelized scintillation layer includes the step of forming openings such as wells, vias, or channels in a body, for example by etching a thick photoresist, ion beam etching, anodic etching, etc., and the step of filling the openings with scintillation material. A completed image sensing apparatus is also taught.

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