Wafer conveying apparatus

Details Wafer conveying apparatus Wafer conveying apparatus

1997-04-22

1998-12-15

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

Nongravity type

414222, 414217, 414757, 414937, 414936, 356399, B65G 4724

Patent

active

058488685

ABSTRACT:
An apparatus for conveying a wafer to wafer work suction-holding stage and then discharging a worked wafer from the wafer work suction-holding stage, including a loader side elevator device, a wafer position correcting stage, a wafer work suction-holding stage, a wafer carrying table and an unloader side elevator device which are successively disposed in this order; and the apparatus further including a conveyor which conveys a wafer inside a loader side magazine carried on the loader side elevator device to a point above the positional correction suction-holding stage, a stopper which positions the wafer conveyed by the conveyor to the wafer position correcting stage, and a feeding pawl moving device which operates after the wafer position correcting stage and wafer work suction-holding stage have been moved vertically so that the upper surface of the wafer position correcting stage is at substantially the same height as the upper surface of the stopper and so that the upper surface of the wafer work suction-holding stage is at the same height as the upper surfaces of the stopper and wafer carrying table.

REFERENCES:
patent: 3902615 (1975-09-01), Levy et al.
patent: 4178113 (1979-12-01), Beaver, II et al.
patent: 4507078 (1985-03-01), Tam et al.
patent: 4764076 (1988-08-01), Layman et al.
patent: 4824309 (1989-04-01), Kakehi et al.
patent: 4900212 (1990-02-01), Mikahara
patent: 4938654 (1990-07-01), Schram

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