Method for forming film by plasma CVD

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma

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427131, 427574, 427577, 427585, H05H 124, G11B 500

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054965950

ABSTRACT:
A magnetic recording medium comprising a back coating layer formed on a surface reverse to a magnetic layer and a carbonaceous film which is formed on the back coating layer and contains fluorine atoms and silicon atoms and/or nitrogen atoms and in which a concentration of fluorine atoms decreases in a depth direction from a surface of the carbonaceous film, while a concentration of the silicon and/or nitrogen atoms increases in the depth direction from the surface of the carbonaceous film, which recording medium has improved running stability, durability and weatherability while electromagnetic conversion characteristics are maintained.

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