Wave transmission lines and networks – Automatically controlled systems – Impedance matching
Patent
1995-07-07
1997-05-13
Gensler, Paul
Wave transmission lines and networks
Automatically controlled systems
Impedance matching
333 99PL, H03H 740
Patent
active
056296533
ABSTRACT:
A detector circuit for controlling an RF match circuit that receives an RF power signal from an RF source and delivers the RF power signal to a load. The RF match circuit includes a first variable reactance element which is controlled by a first control signal and a second variable reactance element is controlled by a second control signal. The detector circuit includes a dual directional coupler which generates a forward signal that is proportional to RF power delivered to the match circuit and a reflected signal that is proportional to RF power reflected back from the RF match circuit. The detector also includes a first branch circuit receiving the reflected signal and producing a first and second output signal therefrom and a second branch circuit receiving the forward signal and producing a first and second output signal therefrom. The detector further includes a first phase detector receiving the first output signals of the first and second branch circuits and generating a first phase detection output signal from which the first control signal is derived; and a second phase detector receiving the second output signals of the first and second branch circuits and generating a second phase detection output signal from which the second control signal is derived.
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Applied Materials Inc.
Gensler Paul
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