Method for automatic optical inspection analysis of integrated c

Details Method for automatic optical inspection analysis of integrated c Method for automatic optical inspection analysis of integrated c

1988-04-06

1989-08-01

Boudreau, Leo H.

Image analysis

Histogram processing

For setting a threshold

382 49, 358101, G06K 900

Patent

active

048539678

ABSTRACT:
An image is taken of a circuit layer pattern containing circuit element representations and the areas of the circuit element representations within the image are modified. The modification includes at least one modification step which consists of thinning the circuit element representations to the point where at least some features of the circuit element representations are skeletonized, to thereby emphasize distinctive features of the circuit element representations. The emphasized distinctive features are compared with previously determined design criteria for distinctive features expected from the prior steps so that any lack of correspondence indicates a defect.

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