Repair line structure for thin film electronic devices

Details Repair line structure for thin film electronic devices Repair line structure for thin film electronic devices

1993-12-20

1995-12-12

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257 59, 257 72, 257642, 437923, H01L 2710, H01L 2715

Patent

active

054752469

ABSTRACT:
Repair lines in an imager device include protective layers disposed over steps in the repair lines where the repair lines extend over underlying components in the imager array. The protective layers each include a layer of polyimide to provide protection for the step portions of the conductive repair line from etchants and the like to which the conductive line is exposed during fabrication processes for the imager array. The protective layers are disposed over the steps of a conductive line in a repair crossover region so as to provide a repair area free from the protective material of the protective layers disposed thereon in the repair crossover region where the conductive repair line is disposed in vertical alignment with an underlying address line.

REFERENCES:
patent: 4723197 (1988-02-01), Takier et al.

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