Coating processes – Centrifugal force utilized
Patent
1992-04-10
1993-10-19
Bell, Janyce
Coating processes
Centrifugal force utilized
427294, 427377, B05D 312
Patent
active
052543676
ABSTRACT:
Coating method and apparatus. Said coating method comprises setting pressure in a chamber higher than the vapor pressure of a solvent mixed in a liquid which is coated on the surface of a matter to be processed, and dropping and spreading the coating liquid on the surface of the matter while rotating the matter by a predetermined number of rotation.
REFERENCES:
patent: 4492718 (1985-01-01), Mayer et al.
patent: 5013586 (1991-05-01), Cavazza
Matsumura Kimiharu
Sakai Hiroyuki
Bell Janyce
Tokyo Electron Kyushu Limited
Tokyo Electron Limited
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