Liquid phosphorous precursor delivery apparatus

Details Liquid phosphorous precursor delivery apparatus Liquid phosphorous precursor delivery apparatus

1995-12-06

1999-07-20

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

118715, C23C 1600

Patent

active

059251891

ABSTRACT:
The present invention recognizes that the build-up of residue in a metal alloy injection valve used to inject a liquid phosphorous precursor compound is due to the nickel in the alloy affecting the liquid phosphorous precursor compound. The invention thus provides components manufactured of an alloy having a low nickel content, preferably less than 5% nickel, and more preferably less than 1%. In an additional aspect of the invention, the alloy is provided with a higher chromium content, preferably at least 15% chromium, more preferably 16-27%.

REFERENCES:
patent: 5234724 (1993-08-01), Schmidt
patent: 5607002 (1997-03-01), Siegele
Lankford, The Making Shaping & Treating of Steel, 10th Ed U S Steel Corp, 1985.

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