Magnetic disk and method of and apparatus for manufacturing magn

Etching a substrate: processes – Forming or treating article containing magnetically...

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156345, 216 67, B44C 122

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active

058795693

ABSTRACT:
To provide a magnetic disk excellent in floating and sliding characteristics in a low floating area. A magnetic disk having a feature that variations in the height of the projections on each surface of protective films in floating ensured areas on both sides of the magnetic disk are .+-.15%, and a magnetic disk device on which the magnetic disk is mounted. A surface processing apparatus for a magnetic disk, including: a first electrode for fixing the magnetic disk, the first electrode having an inside diameter larger than the inside diameter of the non-magnetic substrate; an electrically grounded shield for shielding the first electrode; a second electrode, disposed in parallel to the surface of the magnetic disk, for generating plasma against the surface of the magnetic disk; and a plasma control member, disposed at a position separated from the outer edge of the magnetic disk by a specified distance, for controlling plasma generated against the surface of the magnetic disk; wherein a power is applied between the first and second electrodes for plasma-etching the surface of the magnetic disk.

REFERENCES:
patent: 5411630 (1995-05-01), Nagase et al.
patent: 5549211 (1996-08-01), Nakamura et al.

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