Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1995-08-29
1998-09-08
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324538, 324751, G01R 3102, H01H 3104
Patent
active
058049800
ABSTRACT:
A method for estimating current or detecting defects in an interconnection by monitoring current change of the interconnection. A radiation beam such as a laser, electron or ion beam is irradiated to a subject region to be observed while scanning points of the subject region. Decrease of the supply current during the scanning is detected in the power supply line. The amount of decrease is approximately proportional to the current flowing originally. The value of the current in the interconnection or a defect existing in the interconnection can be estimated or found from the decreased amount. One of or the combination of selective scanning, threshold selection and thin film deposition makes it possible to apply this method to an actual device.
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Karlsen Ernest F.
NEC Corporation
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