Charged particle beam scanning apparatus

Details Charged particle beam scanning apparatus Charged particle beam scanning apparatus

1987-09-24

1990-07-24

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250307, H01J 3728

Patent

active

049437224

ABSTRACT:
Scanning beam apparatus adapted to display two views of a surface for stereoscopic viewing, wherein two series of electrical signals are obtained by scanning the surface with a normal and then tilted beam characterized by a frame store (36) to which the two series of electrical signals are supplied, the frame store including a feedback loop and input and feedback multiplying means (38, 40) and forming a recursive filter, and signal converter means for (42) including a red/green/blue look-up table memory means for generating red/green/blue signals for display by a color monitor (44). Alternate tilting of the beam is achieved by adjusting during alternate scans the currents flowing in the gun alignment coils (12) of the SEM so as to shift the beam, and simultaneously introducing an offset in the signals applied to at least one other element (14 or 16) in the beam forming and focusing assembly, to counteract the shift introduced by the alignment adjustment, whereby the point of intersection of the beam axes follows the focal plane as focus is altered. The two video signals may be correlated to produce a correlation signal whose value for each point in the surface indicates the apparent shift in position of that point as between the normal and tilted beam scans, to produce a signal indicative for the surface topography. The correlating signal may be converted to a focusing control signal and may be enhanced by process for successive approximations.

REFERENCES:
patent: 3927320 (1975-12-01), Chatfield et al.
patent: 4039829 (1977-08-01), Kato et al.

Affiliated with

Also associated with

Rating

Charged particle beam scanning apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam scanning apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam scanning apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1268972