Fluidized bed for production of polycrystalline silicon

Details Fluidized bed for production of polycrystalline silicon Fluidized bed for production of polycrystalline silicon

1990-07-11

1992-08-18

Chaudhuri, Olik

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

422145, 422147, 423348, 427213, C01B 3302

Patent

active

051397625

ABSTRACT:
An improved fluidized bed reactor and a method for utilizing the fluidized bed reactor in the production of, for example, high purity polycrystalline silicon, by the pyrolysis of silane containing gas. The reactor being characterized by an entrainment zone located above a lower reaction zone. The entrainment zone having a cross-sectional area less than or equal to the cross-sectional area of the reaction zone and being capable of maintaining a fluidization gas velocity sufficient to entrain silicon powder particles, yet not sufficient to entrain silicon particles.

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