Radiant energy – Inspection of solids or liquids by charged particles
Patent
1998-04-09
1999-11-23
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
H01J 3704
Patent
active
059904771
ABSTRACT:
A machining, recording, and reproducing apparatus using a scanning probe microscope comprising: a probe equipped with a probe tip at its front end, a vibration application portion consisting of a piezoelectric vibrating body and an AC voltage-generating portion, a vibration-detecting portion consisting of a quartz oscillator and a current/voltage amplifier circuit, a coarse displacement device for bringing the probe close to a surface of a sample, a sample-to-probe distance control device consisting of a Z fine displacement element and a Z servo circuit, a two-dimensional scanning device consisting of an XY fine displacement element and an XY scanning circuit, and a data-processing device for converting a measurement signal into a three-dimensional image. The probe is held to the quartz oscillator by spring pressure of a resilient body.
REFERENCES:
patent: 5641896 (1997-06-01), Karrai
patent: 5767514 (1998-06-01), Lloyd
Patents Abstracts of Japan, vol. 017, No. 596 (P-1636) Oct. 29, 1993.
Patents Abstracts of Japan, vol. 015, No. 079 (P-1170) Feb. 25, 1991.
Nguyen Kiet T.
Seiko Instruments Inc.
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