Method of displaying an image of phase contrast in a scanning tr

Details Method of displaying an image of phase contrast in a scanning tr Method of displaying an image of phase contrast in a scanning tr

1981-05-22

1983-05-03

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, 250397, H01J 3728

Patent

active

043821820

ABSTRACT:
A method of and apparatus for displaying an image of phase contrast in a scanning transmission electron microscope, in which an electron beam flux transmitted through a specimen is deflected with a high frequency and repeatedly moved on an aperture provided in a region where a transmitted electron beam and a scattered electron beam interfere, and among signal components detected by a detector through the aperture, only a signal synchronous with the high frequency is sampled and detection-rectified, whereby the difference of the intensities of the region where both the electron beams interfere is detected so as to display the image of phase contrast of the specimen.

REFERENCES:
patent: 3908124 (1975-09-01), Rose

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