Method of surface treatment

Details Method of surface treatment Method of surface treatment

1984-05-17

1986-02-11

Beck, Shrive P.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

356 72, 356381, 356382, 250227, 250559, 430 30, G01T 1185, H01L 21306

Patent

active

045697175

ABSTRACT:
In a method of surface treatment irradiating a part of a plate to be treated with light flux, detecting a quantity of transmitted light or reflected light on the plate corresponding to the light flux, detecting an end point of surface treatment based on the variation in the detected signal level the combination with the method of a step of detecting whether the detected signal level exceeds a predetermined target level within a predetermined period of time, a step of repeatedly setting up a new target level so long as the detected level is found exceeding the predetermined target level, and a step of determining the end point of the surface treatment at the moment when the detected signal level is found not exceeding the new target level.

REFERENCES:
patent: 3874959 (1975-04-01), Hoekstra et al.
patent: 4039370 (1977-08-01), Kleinknecht
patent: 4142107 (1979-02-01), Hatzakis et al.
patent: 4479848 (1984-10-01), Otsubo et al.
patent: 4491499 (1985-01-01), Jerde et al.
"Process Detection System" by D. H. Jurczyk et al., published in IBM Technical Disclosure Bulletin, vol. 18, No. 6, Nov. 1975.

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